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TÍTULO: Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
AUTORES: Afinogenov, IA; Zeltser, IA; Trunin, EB; Tolstoguzov, A;
PUBLICAÇÃO: 2015, FONTE: ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, VOLUME: 2015
INDEXADO EM: Scopus WOS CrossRef