1
TITLE: Compact XUV excimer radiation sources and their application
AUTHORS: Fedenev, AV; Morozov, A; Wieser, J; Ulrich, A;
PUBLISHED: 2004, SOURCE: Atomic and Molecular Pulsed Lasers V in Proceedings of SPIE - The International Society for Optical Engineering, VOLUME: 5483
INDEXED IN: Scopus
2
TITLE: <title>Compact XUV excimer radiation sources and their application</title>
AUTHORS: Andrei V Fedenev; Andrei Morozov; Jochen Wieser; Andreas Ulrich;
PUBLISHED: 2004
INDEXED IN: CrossRef