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The Role of Modulated Ir Radiometry Measurements in the Characterization of Zr-O-N Thin Films

AuthID
P-003-RPD

Author(s)

Macedo, F

Carvalho, P

Cunha, L

Vaz, F

Gibkes, J

Bein, BK

Pelzl, J

Tipo de Documento

Article

Year published

2009

Publicado

in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850

Volume: 6, Número: SUPPL. 1, Páginas: S760-S766 (7)

Conference

11Th International Conference on Plasma Surface Engineering, Date: SEP 15-19, 2008, Location: Garmisch Partenkirchen, GERMANY, Patrocinadores: European Joint Comm Plasma & Ion Surface Engn

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Publication Identifiers

DOI: 10.1002/ppap.200931802

Handle: https://hdl.handle.net/1822/13634

SCOPUS: 2-s2.0-77954939155

Wos: WOS:000272302900146

Source Identifiers

ISSN: 1612-8850

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The Role of Modulated Ir Radiometry Measurements in the Characterization of Zr-O-N Thin Films

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The Role of Modulated Ir Radiometry Measurements in the Characterization of Zr-O-N Thin Films

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