Comparison of Low- and Room-Temperature Damage Formation in Ar Ion Implanted Gan and Zno

AuthID
P-006-965
7
Author(s)
Wesch, W
·
Azarov, AY
·
Catarino, N
·
Tipo de Documento
Article
Year published
2013
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 307, Páginas: 394-398 (5)
Conference
18Th International Conference on Ion Beam Modifications of Materials (Ibmm), Date: SEP 02-07, 2012, Location: Qingdao, PEOPLES R CHINA, Patrocinadores: Shanghai Inst Microsystem & Informat Technol, Tsinghua Univ, Natl Nat Sci Fdn China, Shandong Univ, Minist Educ, Key Lab Particle Phys & Particle Irradiat, Shandong Univ, State Key Lab Crystal Mat, High Voltage Engn Europa B V, Host: Shandong Univ
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84885181238
Wos: WOS:000321722200088
Source Identifiers
ISSN: 0168-583X
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