Ion Damage Overrides Structural Disorder in Silicon Surface Nanopatterning by Low-Energy Ion Beam Sputtering

AuthID
 P-00J-0V9
8
Author(s)
Gago, R
·
Vázquez, L
·
Muñoz-García, J
·
Cuerno, R
·
Castro, M
Tipo de Documento
Article
Year published
2015
Publicado
in EPL - EPL (Europhysics Letters), ISSN: 0295-5075
Volume: 109, Número: 4, Páginas: 48003
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ISSN: 0295-5075
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