Pelaz, L; Santos, I; Duffy, R; Torregrosa, F; Bourdelle, K
Tipo de Documento
Proceedings Paper
Year published
2012
Publicado
in ION IMPLANTATION TECHNOLOGY 2012 in AIP Conference Proceedings, ISSN: 0094-243X
Volume: 1496, Páginas: 63-66 (4)
Conference
19Th International Conference on Ion Implantation Technology (Iit), Date: JUN 25-29, 2012, Location: Valladolid, SPAIN, Patrocinadores: Adv Ion Beam Technol, Inc, Appl Mat, Inc, ATMI, Axcelis Technologies, Inc, CORE Syst, Elmet Technologies, Inc, Evans Analyt Grp LLC, Excico, High Voltage Engn Europa B V, IBS, NISSIN Ion Equipement Co Ltd, Plansee-Electrograph, Praxair, Inc, Probion Anal, SemEquip, Inc/Ceradyne, SEN Corp
